Specifications.
| Unidirectional repeatability | < 0.003 mm |
| Search directions | ±X, ±Y, -Z |
| Permitted deviation stylus in XYZ directions | ±4mm |
| Contact force in XY | min 0.5N max 0.8N |
| Contact force in Z | 2N |
| Power supply for ver.4.3 and below | +3v…+5v |
| Power supply for ver.4.5 | +5v…+12v |
| Power supply for ver.4.6 and higher | +5v…+24v |
| Current сonsumption | <4mA |
